Abstract:
High-angle angular dark-field (HAADF) is currently one of the most commonly used imaging mode in scanning transmission electron microscopy (STEM). The position of single atom or atomic columns and its chemical information can be affirmed with the application of spherical aberration corrector. Thus, the HAADF-STEM has become a hot technology in high resolution research field. The cognition of experimental key points is the most important issue in acquiring high quality HAADF-STEM images. This article takes FEI Titan G2 60-300 Chemi-STEM Cs-corrected scanning transmission electron microscope as an example, from several key points, such as experimental environment control, sample anti-pollution, electron microscope parameter setting and operation, explains how to obtain high quality experimental points, techniques and related principles of high-resolution HAADF images.