郝龙龙, 覃丽禄. 高质量扫描透射电子显微镜高角环形暗场像的实验关键点[J]. 实验科学与技术, 2020, 18(3): 7-10, 49. DOI: 10.12179/1672-4550.20190123
引用本文: 郝龙龙, 覃丽禄. 高质量扫描透射电子显微镜高角环形暗场像的实验关键点[J]. 实验科学与技术, 2020, 18(3): 7-10, 49. DOI: 10.12179/1672-4550.20190123
HAO Longlong, QIN Lilu. The Experimental Key Points in Acquiring High Quality HAADF-STEM Images[J]. Experiment Science and Technology, 2020, 18(3): 7-10, 49. DOI: 10.12179/1672-4550.20190123
Citation: HAO Longlong, QIN Lilu. The Experimental Key Points in Acquiring High Quality HAADF-STEM Images[J]. Experiment Science and Technology, 2020, 18(3): 7-10, 49. DOI: 10.12179/1672-4550.20190123

高质量扫描透射电子显微镜高角环形暗场像的实验关键点

The Experimental Key Points in Acquiring High Quality HAADF-STEM Images

  • 摘要: 高角环形暗场像(high-angle annular dark-field,HAADF)作为扫描透射电子显微镜(scanning transmission election microscope,STEM)最主要的成像方式之一,是近年来各科研领域高分辨研究的热点技术,在球差矫正器的应用下可实现单原子或原子柱的亚埃级位置和化学成分分辨。实验环节中关键点的认识是获得高质量高角环形暗场像的关键。该文以FEI Titan G2 60-300 Chemi-STEM 球差矫正型扫描透射电子显微镜为例,从实验环境控制、样品防污染、电镜参数设置与操作等关键点方面,阐述了获取高质量高分辨高角环形暗场像的实验要点、技巧与相关原理。

     

    Abstract: High-angle angular dark-field (HAADF) is currently one of the most commonly used imaging mode in scanning transmission electron microscopy (STEM). The position of single atom or atomic columns and its chemical information can be affirmed with the application of spherical aberration corrector. Thus, the HAADF-STEM has become a hot technology in high resolution research field. The cognition of experimental key points is the most important issue in acquiring high quality HAADF-STEM images. This article takes FEI Titan G2 60-300 Chemi-STEM Cs-corrected scanning transmission electron microscope as an example, from several key points, such as experimental environment control, sample anti-pollution, electron microscope parameter setting and operation, explains how to obtain high quality experimental points, techniques and related principles of high-resolution HAADF images.

     

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