Comprehension Experimental Design for Preparation and Optical Band Gap Control of Ultrathin Amorphous Oxide Semiconductor Films

In order to enhance students’ Innovation literacy and integrated scientific research content into experimental teaching, this work designs “experiments on the preparation and optical band gap control of ultrathin amorphous oxide semiconductor films”. InSnO films were fabricated on quartz substrates by magnetron sputtering, and several characterization methods were used to study the effects of thickness on the crystal structure, surface topography and optical band gap of the films. The results show that the thickness of film affects the surface roughness of the film, and the optical band gap of the films decreases with increasing film thickness. This innovative experiment covers material preparation, characterization and mechanism analysis, involving semiconductor, materials science, optoelectronics disciplines, and combined with actual scientific research content, which improves students’ enthusiasm for scientific research, cultivate students’ innovative thinking, and improves their ability to combine theory with practice.