ZHOU Yuan, XIAO Lijuan, WU Yihua, XU Zhongping, CHEN Yaoxing, HUO Baolei. Effect of Buffer Layer on Properties of AZO Film[J]. Experiment Science and Technology, 2016, 14(3): 36-40. DOI: 10.3969/j.issn.1672-4550.2016.03.011
Citation: ZHOU Yuan, XIAO Lijuan, WU Yihua, XU Zhongping, CHEN Yaoxing, HUO Baolei. Effect of Buffer Layer on Properties of AZO Film[J]. Experiment Science and Technology, 2016, 14(3): 36-40. DOI: 10.3969/j.issn.1672-4550.2016.03.011

Effect of Buffer Layer on Properties of AZO Film

  • The quality of AZO thin films can be improved using the epitaxial technique on growing the homogeneous or heterogeneous buffer layer on the substrate with high mismatch. The influence of the preparation parameters of different buffer layers on the photoelectric properties of AZO film and the AZO films’s recent developments are emphatically expounded.Moreover,the development of AZO film and the future development trend are prospected.
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