Analyzing Systematic Errors ofHall Effect Testing System

Electric properties of thin films, such as resistivity, effective carriers density and carrier mobility, can be obtained by using Hall Effect to test thin film samples.But the test results have unavoidable errors affected by computational formulas and the resolution of testing instrument.This paper analyzes the systematic errors caused by computational formulas and the resolution of testing instrument in VDP test and Hall effect test, and thus obtains the error of test rsults.