Error Analysis of the Experiment Measuring Micro Displacement by Liner Array CCD Image Sensor

In the experiment of micro displacement measurement using a liner array CCD image sensor, due to the design flaw of the experimental instrument, the instrument cannot accurately measure the angle between the incident light and the reflected light. As a result, certain errors are incurred in the experiment. The errors are related to the displacement, axis of the lens, and the angle of incident light. Through mathematical derivation and experimental verification, the relationship between the error, displacement and angle is presented. The influence of the error on the experimental results is also studied. MATLAB software was adopted to draw a three-dimensional pattern of the error, angle, and displacement, under the condition that the angle is from 10° to 90° and the displacement is relatively small. The errors due to changes in the distance between the screen and the laser at several common angles are demonstrated.