Study on Calculation Method of Lutherford Backscattering Element Concentration and Depth Distribution Analysis

The Rutherford backscattering experiment can analyze the concentration and depth distribution of impurity elements in materials by the energy spectrum of backscattered particles. The calculation methods for obtaining depth distribution mainly include approximate calculation method (surface energy approximation and average energy approximation) and numerical integration method. The stopping power involved in the calculation process is given by the SRIM program. In this paper, the approximate calculation method with low computational difficulty and low accuracy is compared with the numerical integration method with high computational difficulty and high accuracy. The applicable range of surface energy approximation and average energy approximation in the range of 5% error is given, and the range provides a basis for the selection of the calculation method in the experimental data processing.