离子溅射喷金对陶瓷类样品扫描电镜形貌观察的影响

Effect of Au Coating by Ion Sputtering on SEM Morphology Observation of Ceramic Materials

  • 摘要: 该文报道了离子溅射喷金在羟基磷灰石(HA)陶瓷表面发生金粒异常长大的现象。这种由于喷金在样品表面产生的假象极大地影响了我们对样品表面真实形貌的判断。该文通过改变喷金的电流、时间以及试样对产生这种现象的原因进行了细致地探讨,用于指导不导电或导电性差的样品在扫描电镜观察中喷金条件的选择,以减小喷金对样品形貌观察的影响,获得样品表面真实形貌的高质量图片。

     

    Abstract: A phenomenon of occurring abnormally grown Au particles on the surface of hydroxyapatite (HA) ceramic materials by ion sputtering was reported for the first time. The appearance of the Au particles greatly affect our observation of the real morphology of specimens. This article discusses the cause of this phenomenon by changing the current, time and sample of gold sputtering. In order to reduce the effect of Au coating on the morphology observation of non-conductive or poorly conductive specimens in scanning electron microscope (SEM) as well as obtain real and high quality SEM pictures, proper Au sputtering conditions should be selected.

     

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