Abstract: Combined with the theory of thin film device and the experimental operation,an innovation is performed on the design and teaching of experiment course of thin film sensor fabrication.The project of thin film temperature sensor fabrication was designed.Multiple thin film fabrication methods were used,the test platform of the performance of related devices was set up and the evaluation system of experiment was innovated.Meanwhile,the evaluation system of the experiment course was improved.The innovated experiment has attracted some students from different majors to join,and trained the students’ active thinking and practice ability.It laid the foundation on the establishment of innovative personnel training system.