Abstract: In order to solve the problems of low participation, insufficient in-depth autonomous learning and poor analysis ability in the traditional large class mode, the teaching mode of lecture in small class and seminar in small class is proposed and carried out for the course of microelectronic device. The curriculum design, discussion form and examination method are discussed. From the teaching evaluation results, the students’ satisfaction has been greatly improved from 91.76 in 2016 to 95 in 2017.It can be seen that the reform of the seminar in small class is successful and the students are satisfied with this reform.