Abstract: For the analysis of two types of interference with inductively coupled plasma mass spectrometry (ICP-MS), the mass spectral interference and its cancellation technical plan, such as polyatomic ions, oxides and double charges and hydrides and heterotope are summarized. Meanwhile, the non-mass spectral interference and its cancellation technical plan, including matrix effect and physical effect, are discussed. In addition, this paper discusses the major problems and possible solutions of interference cancellation, and points out that integrating various plans is an effective way to eliminate interference. Finally, this paper puts forward the prospects of study on interference in ICP-MS.