Abstract: With the rapid development of Integrated Circuit (IC) process, there exists an urgent need for the IC process experiment teaching to improve students’ practical ability through modern curriculum design and well-designed teaching content. It is elaborated for the curriculum objectives, curriculum content, teaching links, and curriculum assessments of IC process experiment teaching. The whole experiment course is about the design and manufacture of a capacitor device. In this course, the device simulation software, the layout design software, the manufacturing equipment and the electronic measuring equipment will be applied to build a coherent experimental process. Through this experiment course, students’ ability to solve practical problems based on existing knowledge can be improved.