Abstract: Scanning electron microscope (SEM) is a valuable and precise large-scale instrument, which is an indispensable characterization tool for material detection and analysis. Combining working principle, instrument structure, test method, and result analysis of SEM with virtual simulation technology, a virtual simulation experiment teaching system is successfully developed, which has been applied into the innovative talents training of science and engineering in universities. The system not only plays an active role in the cultivation of autonomous learning ability, cultivating scientific research quality, creative thinking ability and practical ability for university students, but also promotes the opening and sharing of large-scale instruments and equipment.