Abstract: In response to the problem of single content in traditional transparent oxide thin film electrical performance testing experiments, combined with teachers’ lectures and research project, an exploratory experiment “ITO/p-Si contact properties based on transmission line model” and the corresponding assessment system were designed. The variety law and reason of contact resistivity and barrier height of ITO/p-Si contacts under different preparation conditions were analyzed by testing their electrical properties. The experiment assessment system covers literature review, sample preparation, performance measurement, data analysis and extension experiment. The experiment is comprehensive and progressive, which can consolidate professional theoretical knowledge, stimulate students’ interest in learning, and increase students’ innovative ability.