Abstract: Electron beam lithography system plays an indispensable role in the teaching and research of semiconductor physics and devices in universities. Building an electron beam lithography system based on the existing scanning electron microscope of the university has lower cost and multiple applications. By building a complete training system, including theoretical knowledge training, classification practical training, and supplementary training on difficult points, the efficiency and effectiveness of instrument use have been improved. Instrument users and managers work together to maintain and conserve the instrument, ensuring the effectiveness of the instrument use while also extending its service life. This article provides a useful reference for the training and maintenance of similar instruments in university teaching and research.