Abstract: Based on Microelectronics planar process experiment of the original,the“Microelectronic technology experiment”teaching mode is reformed.Introducing the ZnO-thin film field-effect transistor manufacturing technology and semiconductor test analysis experiment,the teaching and research resources were shared.We established a new teaching pattern consisting of teaching content preparation,multimedia teaching,hand on transistor processing and effective experiment appraisal scheme.These four measures successfully arouse students’ enthusiasm for learning,and achieved good teaching effect.