电泳沉积法制备SrTiO3薄膜电极的工艺研究

Study on Electrophoretic Deposition Preparing SrTiO3 Thin Film

  • 摘要: 纳米SrTiO3具有很广泛的用途,其电泳沉积工艺低成本、易操作,可广泛应用于实验室研究。该文从粉体浓度、碘浓度、沉积电压、沉积时间共4个方面对电泳沉积工艺进行了讨论,得出在电压5 V、SrTiO3浓度3.5%、碘浓度1.0 mg/mL、600 s条件下沉积的薄膜电极较好,表面均匀,膜厚约为70 μm。该实验可作为专业基础实验面向材料、化学专业的本科生、硕士生开放。

     

    Abstract: Nano-SrTiO3 was widely used in many fields.Electrophoretic deposition processes low-cost,easy to operate,it can be widely used in laboratory research.In this paper,the optimum process of the electrophoretic deposition process(EDP)in SrTiO3 thin film was studied in powder concentration,iodine concentration,deposition voltage,deposition time.The results show that the thin film electrodes deposited under voltage of 5 V,SrTiO3 concentration of 3.5%,iodine concentration of 1.0 mg/mL and deposition time of 600 s have good surface uniformity and film thickness of about 70 μm.This experiment can be used as a professional basic experiment for undergraduate,master's degree students of materials and chemistry.

     

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